線上膜厚測定儀

製造商：STEAG ETA-Optik GmbH

型號：ETA-MASS 1/0 LU

價格：$500,000.-

數量：一式

地點：桃園平鎮

製造日期：2005

規格：

Wavelength: 450-900 nm
Resolution:0.8 nm, 512 pixels
Repeatability: 0.5% Focal length: 50nm F-number: 3.1 Entrance slit: 3nm x 50 um Grating: holographic transmission grating from own production 50%-90% diffraction efficiency
Detector: 16 bit A/D
Integration time: 6ms - 60 s
Averaging: on board
Measuring rate: 5 s¯¹